Various chemicals are used in semiconductor manufacturing.

Representative examples:

・Sulfuric acid (H₂SO₄)

・Hydrofluoric acid (HF)

・Hydrochloric acid (HCl)

・Ammonia

Applications:

・Wafer cleaning

・Oxide film removal

・Surface treatment

Many of these are highly corrosive.

Photoresists are used in the photolithography process.

These are resin materials that react to light.

Applications:

・Forming circuit patterns

・Forming fine structures

Photoresists contain organic solvents and other substances.

Many specialty gases are used in semiconductor manufacturing.

Examples:

・Silane (SiH4)

・Ammonia (NH3)

・Fluorine-based gases

・Argon

Applications:

・Deposition

・Etching

・Plasma treatment

Some of these may be flammable or toxic.

The chemicals used in semiconductor manufacturing carry various risks.

Examples:

・Corrosiveness

・Toxicity

・Flammability

・Environmental pollution

For this reason, strict management is required.

In semiconductor factories, specialty gases are managed by dedicated supply systems.

Examples:

・Gas cylinders

・Gas piping

・Gas monitoring equipment

Leak detection systems are also important safety equipment.

Liquid chemicals are managed by chemical supply systems.

What is managed:

・Concentration control

・Supply control

・Waste liquid treatment

Chemical solutions require strict handling.

Because chemicals are handled, worker safety is also important.

Measures:

・Personal protective equipment (PPE)

・Safety training

・Accident response drills

These reduce the risk of accidents.

Chemical emissions are also controlled at semiconductor factories.

Examples:

・Exhaust gas treatment

・Waste liquid treatment

・Filter treatment

Advanced treatment equipment is required to comply with environmental regulations.

Chemicals are regulated in each country.

Examples:

・REACH (Europe)

・RoHS

・TSCA (USA)

Semiconductor companies need to comply with these.

Semiconductor companies have introduced chemical management systems.

Content:

・Usage management

・Safety data management

・Emission management

These relate to both the environment and safety.

Future challenges:

・Stricter environmental regulations

・Reducing chemicals

・Developing alternative materials

The semiconductor industry is required to achieve both safety and environmental protection.

・Semiconductor manufacturing uses many chemicals

・Acids, solvents, and specialty gases are important materials

・There are risks such as corrosiveness and toxicity

・Emission control and safety management are necessary

・Compliance with international regulations is required

1.What is the main reason acids and solvents are used in semiconductor manufacturing?

2.In which processes are specialty gases used in semiconductor manufacturing?

3.Why is chemical management important?

 

Column Supervisor: Koji Kakumoto (President, OTIS Co., Ltd.)

After studying abroad and working in planning and development at a trading company, he joined OTIS Co., Ltd. in 2011. While primarily working in the Corporate Planning Department, he has also served concurrently in manufacturing and technical divisions, and since 2018 has served as President, working to drive business growth and strengthen the organization.

 

This article is a general technical explanation intended for educational purposes and does not refer to any specific company, product, or technology.