A wide variety of waste is generated in semiconductor manufacturing.

Main types:

・Chemical waste liquids

・Organic solvent waste

・Metal-containing wastewater

・Used resist

Many of these can be hazardous.

Many acids and alkalis are used in semiconductor manufacturing.

Examples:

・Sulfuric acid

・Hydrofluoric acid

・Hydrogen peroxide

These waste liquids are treated safely through neutralization and other processes.

Photoresist materials are used in the photolithography process.

Used resist is treated as waste.

Because it contains organic solvents, proper treatment is required.

Metal materials are also used in semiconductor manufacturing.

Examples:

・Copper

・Aluminum

・Tungsten

For this reason, wastewater may contain trace amounts of metals.

These are removed by dedicated treatment equipment.

Large-scale wastewater treatment facilities are installed at semiconductor factories.

Main treatments:

・Neutralization

・Sedimentation

・Filtration

Through these, wastewater is treated to meet environmental standards.

At semiconductor factories, waste is strictly segregated.

Examples:

・Chemical waste

・Metal waste

・General waste

Proper segregation leads to safe treatment.

Recycling is also advancing to reduce waste.

Examples:

・Solvent recovery

・Metal recovery

・Material reuse

This improves resource use efficiency.

Waste treatment is subject to strict laws and regulations.

Examples:

・The Waste Management Act

・Chemical regulations

・Environmental emission standards

Companies need to comply with these regulations.

Environmental audits are also conducted at semiconductor companies.

Content:

・Waste management

・Wastewater management

・Emissions management

This reduces environmental risk.

In recent years, sustainable manufacturing has become important.

Examples:

・Reducing waste

・Promoting reuse

・Reducing environmental impact

These also affect how companies are evaluated.

Future challenges:

・Reducing waste

・Expanding recycling

・Developing environmental technologies

The semiconductor industry is required to balance the environment and manufacturing.

・Semiconductor manufacturing generates a lot of waste

・Chemical waste liquids and resist waste are the main examples

・Wastewater treatment facilities ensure environmental standards are met

・Recycling and reuse are advancing

・Laws, regulations, and environmental audits are important

1.What are typical types of waste generated in semiconductor manufacturing?

2.What is the main role of wastewater treatment facilities?

3.Why is waste management important in the semiconductor industry?

 

Column Supervisor: Koji Kakumoto (President, OTIS Co., Ltd.)

After studying abroad and working in planning and development at a trading company, he joined OTIS Co., Ltd. in 2011. While primarily working in the Corporate Planning Department, he has also served concurrently in manufacturing and technical divisions, and since 2018 has served as President, working to drive business growth and strengthen the organization.

 

This article is a general technical explanation intended for educational purposes and does not refer to any specific company, product, or technology.