PFAS stands for Per- and Polyfluoroalkyl Substances.

They include several thousand or more chemicals.

Characteristics:

・Carbon–fluorine bonds

・Extremely stable

・Difficult to break down

For this reason, they are also called “forever chemicals.”

PFAS are important materials in semiconductor manufacturing.

Main applications:

・Photoresist materials

・Etching processes

・Water-repellent coatings

・Fluoropolymer components

They are often indispensable, especially in microfabrication processes.

In advanced semiconductors, photolithography is an important process.

In this process, fluorine-based materials are used for

・Pattern formation

・Surface control.

For this reason, PFAS regulations directly affect semiconductor manufacturing.

Many fluoropolymer materials are also used in semiconductor equipment.

Examples:

・PTFE

・PFA

・FEP

Applications:

・Chemical piping

・Equipment components

・Sealing materials

Reason:

・Their chemical resistance

・And heat resistance

are extremely high.

The debate on PFAS regulation is especially advanced in Europe (EU).

In the EU, broad restrictions on PFAS are being considered.

Scope:

・Manufacturing

・Use

・Sales

Many industries could be affected.

The semiconductor industry has expressed concern about a blanket ban on PFAS.

Reasons:

・There are few alternative materials

・They are indispensable for advanced technologies

・Impact on the supply chain

In particular,

it is difficult to completely eliminate PFAS from leading-edge semiconductor manufacturing.

For this reason, research into PFAS alternatives is currently under way.

Examples:

・New photoresists

・Alternative coatings

・Low-PFAS materials

However, there are also many technical challenges.

PFAS hardly break down at all in nature.

Problems:

・Water contamination

・Soil contamination

・Bioaccumulation

This is the background to the regulatory debate.

Semiconductor companies are working to address the PFAS issue.

Examples:

・Reducing emissions

・Recovery technologies

・Reducing usage

Environmental measures have become important.

PFAS regulation is also related to industrial policy.

The reason:

Semiconductors are a national security technology.

For this reason, the balance between environmental regulation and industrial competitiveness is being debated.

The PFAS issue will continue to affect the semiconductor industry.

Key themes:

・Environmental protection

・Maintaining technology

・Developing alternative materials

The challenge is how to achieve all of these at the same time.

・PFAS are a group of fluorine-based chemicals

・They are widely used in semiconductor manufacturing

・Their resistance to breaking down is the problem

・Regulatory discussions are progressing in the EU

・The semiconductor industry is concerned about the impact

・Research into alternative materials is advancing

1.Why are PFAS called “forever chemicals”?

2.In which semiconductor manufacturing processes are PFAS used?

3.Why do PFAS regulations affect the semiconductor industry?

 

Column Supervisor: Koji Kakumoto (President, OTIS Co., Ltd.)

After studying abroad and working in planning and development at a trading company, he joined OTIS Co., Ltd. in 2011. While primarily working in the Corporate Planning Department, he has also served concurrently in manufacturing and technical divisions, and since 2018 has served as President, working to drive business growth and strengthen the organization.

 

This article is a general technical explanation intended for educational purposes and does not refer to any specific company, product, or technology.